Collation
X, 611 P.: Illus
Addition
,
Title
Micro-electro-mechanical systems
تاريخ ورود اطلاعات
1379/12/01
Publication Year
1999
Publication
American Society of Mechanical Engineers
Subject
Microelectronics- Congresses,Electromechanical devices- Congresses
Editor
Edited by Abraham P. Lee ... [et al.]
DocumentNumber
30661
ISBNN
, 1 , 2626 , 3-1 , 0791816389
RecordNumber
8572