Edition
2nd ed
Collation
xiv, 527 P.: Figs
Addition
,
Title
Introduction to Microlithography
Contents
An introduction to lithography
LC Class
621
LC Number
.381531
LC CutterNumber
I 61,Ed.2
Publication Year
1994
Publication
ACS professional reference book
Subject
Microlithography- Congresses,Photoresists- Congresses,Plasma etching- Congresses,Semiconductors- Etching- Congresses
Editor
Edited by Larry F. Thompson,C. Grant Wilson,Murrae J. Bowden
DocumentNumber
2921
ISBNN
, 1 , 7774 , 2-1
RecordNumber
1698