Collation :
xiii, 557 P.: Tables, Figures
Title :
Plasma- Surface Interactions And Processing Of Materials
LC CutterNumber :
N 279 P
Publication :
Kluwer Academic
Series :
Nato Asi Seriese, Applied Science: V;176
Subject :
Materials-Sufaces-Congresses,Materials- Effect Of Radiation On- Congresses,Microelectronics- Materials- Effect Of Radiation On- Congresses
Editor :
Edited by Orlando Auciello ... [et al]
