Collation
xiii, 557 P.: Tables, Figures
Addition
,
Title
Plasma- Surface Interactions And Processing Of Materials
LC Class
620
LC Number
.44
LC CutterNumber
N 279 P
Publication Year
1988
Publication
Kluwer Academic
Series
Nato Asi Seriese, Applied Science: V;176
Subject
Materials-Sufaces-Congresses,Materials- Effect Of Radiation On- Congresses,Microelectronics- Materials- Effect Of Radiation On- Congresses
Editor
Edited by Orlando Auciello ... [et al]
DocumentNumber
6674
ISBNN
, 1 , 4362 , 2-1
RecordNumber
3264