Author Statement

H. Fujita

Collation

xii, 211 P

Addition

,

Title

Micromachines as tools For nanotechnology

LC Class

620

LC Number

.5

LC CutterNumber

F961M

تاريخ ورود اطلاعات

1384/08/01

Publication Year

2003

Publication

Berlin Springer

Subject

Nanotechnology , Microelectromechanical systems

DocumentNumber

8298

ISBNN

, 1 , 10129 , 2-1

RecordNumber

4528