• Collation
    X, 611 P.: Illus
  • Addition
    ,
  • Title

    Micro-electro-mechanical systems

  • تاريخ ورود اطلاعات
    1379/12/01
  • Publication Year
    1999
  • Publication
    American Society of Mechanical Engineers
  • Subject

    Microelectronics- Congresses,Electromechanical devices- Congresses

  • Editor
    Edited by Abraham P. Lee ... [et al.]
  • DocumentNumber
    30661
  • ISBNN
    , 1 , 2626 , 3-1 , 0791816389
  • RecordNumber
    8572