Author Statement
W. Scot Ruska
Collation
xviii, 430 P.: Figure, Table
Addition
,
Title
Microelectronics processing: an introduction to the manufacture of integrated circuits
LC Class
621
LC Number
. 38173
LC CutterNumber
R 949 M
Publication Year
1988
Publication
McGraw Hill
Subject
Integrated circuits- Design and construction
DocumentNumber
31329
ISBNN
, 1 , 2702 , 3-1
RecordNumber
9045