Author Statement

Stanley Middleman,Arthur K. Hochberg

Collation

xvii, 774 P.: Diagram

Addition

,

Title

Process Engineering Analysis in semiconductor device fabrication

LC Class

621

LC Number

.38152

LC CutterNumber

M 627 P

Publication Year

1993

Publication

McGraw-Hill

Subject

Semiconductors- Design and construction

DocumentNumber

6191

ISBNN

, 1 , 397 , 2-1

RecordNumber

2782