Author Statement
S. Fatikow,U. Rembold
Collation
xii, 408 P.: Fig
Addition
,
Title
Microsystem technology and microrobotics
LC Class
621
LC CutterNumber
F 253 M
Publication Year
1997
Publication
Springer
Subject
Electromechanical devices- Design and construction,Microfabrication,Robotics.
DocumentNumber
30564
ISBNN
, 1 , 2169 , 3-1
RecordNumber
8488