Author Statement
Edited by R.A. Levy
Collation
xiv, 985 P.: Illus
Addition
,
Title
Microelectronic materials and processes
LC Class
621
LC Number
. 3817
LC CutterNumber
M 626
Publication Year
1989
Publication
Kluwer Academic
Subject
Microelectronics- Materials- Congresses,Integrated circuits- Very large scale integration- Design and construction- Congresses
DocumentNumber
30785
ISBNN
, 1 , 1216 , 3-1
RecordNumber
8641