Collation
xiii, 611 P.: Figure
Addition
,
Title
Micro-electro-mechanical systems (mems) 1991
LC Class
621
LC Number
.381
LC CutterNumber
M 626
تاريخ ورود اطلاعات
1381/11/01
Publication Year
1999
Publication
The American society of mechanical Engineers
Subject
Microelectro mechanical systems congresses,Fluidic devices,Microelectronic packaging- Congresses
Editor
Edited by Y. C. Lee,Ken Goodson,Roberts Keynton
DocumentNumber
31316
ISBNN
, 1 , 2626 , 3-1
RecordNumber
9194